Offset vertical device

ABSTRACT

The present invention includes a method for forming a memory array and the memory array produced therefrom. Specifically, the memory array includes at least one first-type memory device, each of the at least one first-type memory device comprising a first transistor and a first underlying capacitor that are in electrical contact to each other through a first buried strap, where the first buried strap positioned on a first collar region; and at least one second-type memory cell, where each of the at least are second-type memory device comprises a second transistor and a second underlying capacitor that are in electrical contact through an offset buried strap, where the offset buried strap is positioned on a second collar region, wherein the second collar region has a length equal to the first collar region.

RELATED APPLICATION

This application is a divisional application of U.S. patent applicationSer. No. 10/813,352, filed on Mar. 30, 2004 U.S. Pat. No. 7,247,905.

FIELD OF THE INVENTION

The present invention relates to electronic devices, and moreparticularly to a memory array comprising memory trench devices havingoffset buried strap regions, where each memory trench device isoptimized for increased capacitance.

BACKGROUND OF THE INVENTION

Dynamic Random Access Memory (DRAM) cells are well known. A DRAM cell isessentially a capacitor for storing charge and an access transistor(also called a pass gate) for transferring charge to and from thecapacitor. Data (1 bit) stored in the cell is determined by the absenceor presence of charge on the storage capacitor. Because cell sizeaffects chip density, size and cost, reducing cell area is one of theDRAM designer's primary goals.

One way to accomplish this density goal without sacrificing storagecapacitance is to use trench capacitors in the cells. Trench capacitorscan be formed by etching deep trenches in a silicon substrate andforming vertically orientated capacitors within each deep trench. Thus,the surface area required for the storage capacitor is dramaticallyreduced without sacrificing capacitance, and correspondingly, storablecharge. In order to further decrease cell area, the access transistormay also be vertically orientated. The source of the vertical accesstransistor is a buried strap, which electrically connects the verticalaccess transistor to the underlying capacitor.

In typical memory array designs, the adjacent memory devices must besubstantially separated to ensure that the buried strap regions ofadjacent memory devices do not interact and cause buried strap leakage,where buried strap leakage disadvantageously reduces data retentiontime.

Referring to the prior memory array depicted in FIG. 1, buried strapleakage occurs between adjacent memory trench devices 14 (also referredto as memory cells) when the devices are positioned in close proximityto each other and allow for electrical interaction between the buriedstrap regions 15 of adjacent memory trench devices 14. Each memorytrench device 14 typically comprises at least a trench capacitor 20 anda vertical transistor 10.

Referring to FIG. 2, in one prior memory array, buried strap leakage maybe reduced by offsetting the buried strap regions 15 of each memorytrench device 17, 18, where the offset increases the distance separatingthe adjacent buried strap regions 15. In prior memory arrays, the offsetburied strap memory device 17 also comprises a recessed oxide collar 16,where the top surface of the recessed oxide collar 16 is at a greaterdepth from the top surface of the substrate 7 than the top surface ofoxide collar 19 of the adjacent memory trench device 18.

Oxide collars 16, 19 are utilized to suppress parasitic leakage bycontrolling the threshold voltage of a parasitic transistor, which isformed between the buried strap 15 and the electrode material of thecapacitor 20 in each trench device. In order to suppress parasiticleakage, the oxide collar 16, 19 must be greater than a minimum oxidecollar length L1. Therefore, the recessed oxide collar 16 must begreater than the minimum oxide collar length L1 in order to suppressparasitic leakage in devices 17, 18.

Still referring to FIG. 2, memory trench devices 18 having oxide collars19 that are not recessed are disadvantageously not optimized for maximumcapacitance; because the greater length L2 of the oxide collar 19effectively reduces the size of the underlying capacitor 20. Inaddition, the greater length of L2 causes increased external resistanceof the filled trench poly and thus slows down memory read/writeoperation. Therefore, a tradeoff exists in prior memory array designs,where offsetting the buried strap 15 may suppress the loss of thestorage charge due to buried-strap leakage, but at the expense ofcapacitor area, which reduces capacitance.

In view of the prior art mentioned above, a memory array comprisingmemory trench devices that are optimized for maximum capacitance andmemory array density is needed.

SUMMARY OF THE INVENTION

An object of the present invention is to provide a memory arraycomprising vertical trench devices having suppressed buried-strapleakage and maximum capacitance. The term “maximum capacitance” is meantto denote a capacitance ranging from about 20×10⁻¹⁵ farads to about40×10⁻¹⁵ farads. It is another object of the present invention toprovide a memory array comprising memory trench devices (also referredto as memory cells) having offset buried straps, equal length offsetcollars, and offset bottling.

These and other objectives are achieved in the present invention byproviding memory trench devices having buried strap regions that areoffset from the buried strap regions of adjacent memory trench devices,where oxide collars in each memory trench device are of equal length.The simultaneous application of offset buried strap regions and equallength oxide collars provides decreased spacing between adjacent memorydevices and maximum capacitance. Additionally, the capacitance of thememory trench devices may be further increased by capacitor regionshaving offset bottled regions utilized in combination with the offsetburied strap regions and equal length oxide collars. Broadly, theinventive memory cell array comprises:

at least one first-type memory device, each of the at least onefirst-type memory device comprises a first access transistor and a firstunderlying capacitor that are in electrical contact to each otherthrough a first buried strap, the first buried strap positioned on afirst collar region; and

at least one second-type memory device, each of the at least onesecond-type memory device comprises a second access transistor and asecond underlying capacitor that are in electrical contact through anoffset buried strap, the offset buried strap positioned on a secondcollar region, wherein the second collar region has a length equal tothe first collar region.

The memory array may also include at least one other-type of memorydevice, each of the at least one other-type of memory device comprisinganother transistor and another underlying capacitor that are inelectrical contact to each other through a further-offset buried strap,the further-offset buried strap positioned on another collar region,wherein the other collar region has a length equal to the second collarregion and the first collar region.

Another aspect of the present invention is a method of forming the abovememory array including offset buried strap regions and equal lengthoxide collars. Broadly, the method of present invention comprises thesteps of:

etching a substrate to provide a first trench having an initial depthand a second trench having an intermediate depth to produce an offsetbetween the first trench region and the second trench region in avertical dimension;

forming sacrificial sidewall spacers to the initial depth of the firsttrench and the intermediate depth of the second trench;

etching the first trench to a first collar depth and the second trenchto a second collar depth, wherein the offset between the first trenchand the second trench is maintained;

forming collars within the first trench and the second trench, thecollars positioned underlying the sacrificial sidewall spacers withinthe first trench and the second trench;

forming capacitors in the first trench and the second trench, each ofthe capacitors extending above a bottom surface of the collars;

recessing the collars in the first trench and the second trench, whereinrecessed collars in the first trench and the second trench are of equallength;

forming buried straps atop the collars in the first trench and thesecond trench, wherein the buried straps of the first trench arevertically offset from the buried straps of the second trench; and

forming access transistors atop the capacitors in the first trench andthe second trench.

The method for forming a memory array with offset buried strap regionsand equal length oxide collars may also comprise forming another trenchhaving another-offset buried strap and equal length collars.

Compared to current designs, the present invention provides a memoryarray that suppresses buried strap leakage by offsetting the buriedstrap regions of adjacent memory trench devices, and provides optimizedcapacitance for each memory trench device by incorporating equal lengthoxide collars into each memory trench device. By utilizing equal lengthcollars, the minimum collar length required to suppress parasiticleakage may be implemented into each memory trench device, allowing formaximum capacitor area, which provides optimized capacitance. Moreover,the equal length oxide collar enables the length of the inside poly tobe the minimum collar length. Therefore, the poly resistance is reducedand thus memory read/write operation speed is enhanced.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 illustrates (through cross-sectional view) a prior art memoryarray.

FIG. 2 illustrates (through cross-sectional view) another prior artmemory array comprising offset buried strap regions and non-equal lengthcollar regions.

FIG. 3 illustrates (through cross-sectional view) one embodiment of thememory array of the present invention comprising offset buried strapregions and equal length collar regions.

FIGS. 4-14 illustrate (through cross-sectional view) the process stepsfor producing the memory array depicted in FIG. 3.

FIG. 15 illustrates (through cross-sectional view) another embodiment ofthe memory array of the present invention comprising a further-offsetburied strap.

DETAILED DESCRIPTION OF THE INVENTION

A memory array structure, and method of forming the same, will now bediscussed in greater detail by referring to the drawings that accompanythe present application. It is noted in the accompanying drawings likeand corresponding parts are referred to by like reference numbers.Although the drawings show the presence of an array region containingonly two memory trench devices, multiple memory trench devices are alsowithin the scope of the present invention. Additionally, any number ofarray and support regions is also contemplated herein.

The present invention provides a memory array comprising trench memorydevices having substantially minimized buried strap leakage and maximumtrench capacitance. Referring to FIG. 3, the memory array 5 comprises asubstrate 7 having deep trench regions, where each deep trench regioncomprises a trench memory device. The term “deep trench” is meant todenote a trench having a depth of approximately 1 μm or greater from thetop surface of the substrate 7.

Each memory trench device, also referred to as a memory cell, includes atrench capacitor 20 positioned in the lower portion of the deep trenchand an access transistor 10 positioned atop the trench capacitor 20. Thetrench capacitor 20 and the access transistor 10 are in electricalcontact through a buried strap 15. The present memory array 5 alsocomprises at least a first-type memory trench device 21 and asecond-type memory trench device 22, where the buried strap 15 of thefirst-type memory trench device 21 is offset from the buried strap 15 ofthe second-type memory device 22. Offsetting the buried strap regions 15of the adjacent memory devices 21, 22 provides minimum device spacing,while suppressing buried strap leakage and therefore provides themaximum memory array density. The term “maximum memory array density”denotes storing several gigabytes of data. The term “minimum devicespacing” denotes spacing between adjacent memory devices on the order ofabout 100 nm or less. Typically, the buried strap 15 of the first-typememory device 21 is offset from the buried strap 15 of the second-typememory device 22 by a vertical dimension ranging from about 0.2 μm toabout 0.8 μm. More typically, the offset is from about 0.4 μm to about0.6 μm.

In addition to offset buried strap regions 15, the present memory array5 further comprises equal length oxide collar regions 23, 24, where thevertical length L3 of the oxide collar 23 of the first-type memorytrench device 21 is equal to the vertical length L4 of the oxide collar24 of the second-type memory device 22. Contrary to prior memory arraydesigns having offset buried strap regions and non-equal oxide collar(L1<L2), as depicted in FIG. 2; the present memory array 5 includesoffset buried strap regions 15 and equal length oxide collar 23, 24.Therefore, the present memory array allows for each memory device 21, 22to be optimized for maximum capacitance. The present device 21, 22further comprises trench top oxide layers 36, gate dielectrics 37, nodedielectric 31, and gate conductor 38. The method for forming the memoryarray 5 depicted in FIG. 3 is now described in greater detail referringto FIGS. 4-14.

Referring to FIG. 4, an initial structure 6 is provided including asubstrate 7; a film stack 9, which may include an oxide layer 11 and anitride layer 12; and a hardmask 13. The substrate 7 may comprise anysemiconducting material, including but not limited to: Si, strained Si,Si_(1-y)C_(y),Si_(1-x-y)Ge_(x)C_(y), Si_(1-x)Ge_(x), Si alloys, Ge, Gealloys, GaAs, InAs, InP as well as other III-V and II-VI semiconductors.The substrate 7 may also be silicon-on-insulator substrates (SOI) orSiGe-on-insulator (SGOI) substrates. The thickness of the substrate isinconsequential to the present invention. Preferably, the substrate 7comprises a Si-containing material.

The film stack 9 is formed atop the substrate 7 and may include oxide,nitride, oxynitride or any combination thereof. In a preferred example,the film stack 9 comprises a nitride layer 12 positioned atop an oxidelayer 11.

The oxide layer 11 may be formed by a thermal growth process.Alternatively, the oxide layer 11 may be formed atop the substrate 7using a conventional deposition process such as chemical vapordeposition (CVD), plasma-assisted CVD, or chemical solution deposition.The oxide layer 11 preferably comprises SiO₂, but may be other oxidematerials including, but not limited to: ZrO₂, Ta₂O₅ or Al₂O₃. The oxidelayer 11 may have a thickness ranging from about 2 nm to about 20 nm,preferably being about 5 nm.

A nitride layer 12 may then be formed atop the oxide layer 11 using aconventional deposition process, such as chemical vapor deposition(CVD), plasma-assisted CVD, or chemical solution deposition. The nitridelayer 12 preferably comprises Si₃N₄. The nitride layer 12 may have athickness ranging from about 10 nm to about 500 nm, preferably on theorder of about 200 nm.

A hardmask 13 is then formed atop the pad stack 9 using conventionaldeposition, followed by photolithography and etching. For example, ahardmask-patterning layer may be applied to the upper surface of the padstack 9 by chemical vapor deposition (CVD) and related methods. Thecomposition of the hardmask-patterning layer may include silicon oxides,silicon carbides, silicon nitrides, silicon carbonitrides, etc. Spin-onmethods may also be utilized to form the hardmask-patterning layer,where the spin-on applied material may include silsequioxanes,siloxanes, and boron doped silicate glass (BSG). Preferably, thehardmask-patterning layer comprises oxide materials, such as SiO₂,deposited by chemical vapor deposition.

A thin layer of conventional photoresist material (not shown) is thenapplied top the hardmask-patterning layer via spin-coating or similarprocesses. Following application of the photoresist layer, thephotoresist is soft-baked, where the solvents of the photoresist layerare evaporated via heating. The layer of photoresist is then patternedutilizing conventional photolithography and development processingsteps. Specifically, a pattern is provided by exposing the photoresistto a pattern of radiation, and then developing the pattern into thephotoresist utilizing a conventional resist developer.

Once the patterning of the photoresist is completed, the sections of thehardmask-patterning layer covered by the photoresist are protected,while the exposed regions are removed using an etching process selectiveto removing the exposed portions of the hardmask-patterning layerwithout substantially etching the photoresist and the underlying padstack. Preferably, the etch chemistry is selective to removing the SiO₂of the hardmask 13 selective to the Si₃N₄ of the nitride layer 12 andthe patterned photoresist. The patterned photoresist layer may then bestripped using a conventional chemical strip.

Following hardmask 13 formation, the exposed portions of pad stack 9 areetched to expose selected portions of the substrate 7, in which deeptrenches will be subsequently formed. Typically, the etch process may bea directional etch such as: reactive ion etch. Alternatively, thehardmask 13 and the pad stack 9 may be etched together in one stepselective to the photoresist. The photoresist may then be stripped.

Referring now to FIG. 5, a photoresist block mask 25 is then formedoverlying a portion of the memory array, where at least one otherportion of the array is exposed. More specifically, a layer ofphotoresist is first blanket deposited atop the entire structuredepicted in FIG. 4. The photoresist layer is then selectively exposed toa pattern of light and developed to form block mask 25.

The exposed regions of the substrate 7 are then selectively etched toprovide the initial depth D1 of the deep-type trench 26, in which asecond-type memory device will be subsequently formed, while the regionsunderlying the block mask 25 are protected. The deep-type trench 26 isetched to an initial depth D1 in the exposed region of the substrate 7by a selective etch process that etches the substrate 7 selective to theblock mask 25 and the hardmask 13. The initial depth D1 may range fromabout 0.2 μm to about 0.8 μm, preferably being from 0.4 μm to 0.6 μm.

Any directional etch process, such as reactive ion etch (RIE), mayprovide the initial depth D1 of the deep-type trench 26, so long as etchselectively to removing substrate material without substantially etchingthe photoresist block mask 25 or hardmask 13 is maintained. The etchprocess may be timed, where the time period may be on the order of about30 to 60 seconds. Following initial deep-type trench 26 processing, theblock mask 25 is removed by a conventional stripping method.

Referring now to FIG. 6, an offset-type trench 27 is then etched duringa second etch process to an initial depth D2 in a portion of thesubstrate 7, which was previously protected by the now removed blockmask. The initial depth D2 may range from about 0.2 μm to 0.8 μm,preferably being from 0.4 μm to 0.6 μm. A first-type memory device willbe subsequently formed within the offset-type trench 27. Additionally,the second directional etch process further extends the deep-type trench26 into the substrate 7. Further, the second etch process defines thedepth of the subsequently formed oxide collar measured from the surfaceof the substrate 7 to the top surface of the equal length oxide collarsin both the deep-type trench 26 and the offset-type trench 27. Theinitial depth of the offset-type trench 27 is offset from the deep-typetrench 26, following the second etch process, by a vertical dimension D3on the order of about 0.2 μm to about 0.8 μm, preferably being from 0.4μm to 0.6 μm.

The second etch process may be performed by any directional etchprocess, such as reactive ion etch (RIE), so long as selectively ismaintained to removing the substrate material without substantiallyetching the hardmask 13. Preferably, the etch chemistry may includefluorine-based, chlorine-based, and/or bromide-based gas chemistrieshaving a high silicon etch rate with selectivity to oxide materials. Theetch process may be timed, where the time period may be on the order ofabout 30 to about 60 seconds.

Still referring to FIG. 6, sacrificial spacers 28 are then formed alongthe sidewalls of the trenches 26, 27 by conventional deposition and etchprocesses. Specifically, a film layer may first be blanket deposited bychemical vapor deposition (CVD), plasma-assisted CVD, low-pressure CVDand like deposition processes. Following deposition, the film layer isthen etched using conventional etch processes, including but not limitedto RIE. Preferably, the film layer is Si₃N₄ The thickness of thesacrificial spacers 28 may range from 10 nm to 20 nm, preferably being15 nm. Alternatively, the sacrificial spacers 28 may be oxide formed bythermal oxidation or deposition.

Referring to FIG. 7, a third etch process is then performed to furtherextend the deep-type trench 26 and offset-type trench 27 into thesubstrate 20. It is noted that the vertical dimension D₃ separating thedeep-type trench 26 from the offset-type trench 27 is maintained.Further, the third etch process defines the depth of the subsequentlyformed equal length oxide collars measured from the surface of thesubstrate 7 to the bottom surface of the equal length oxide collars inboth the deep type trench 26 and the offset type trench 27.

The third etch process may be any directional etch, such as RIE, so longas selectively is maintained to removing the substrate material withoutsubstantially etching the hardmask 13 or the sacrificial spacers 28.Preferably, the etch process comprises fluorine etch chemistries and isselective to removing the Si of the substrate 7 without substantiallyetching the oxide of the hardmask 13. The etch process may be timed,where the time period may be on the order of approximately 2 minutes.

Referring to FIG. 8, oxide collars 23, 24 are then formed on the exposedsidewalls of the trenches 27, 26 by local oxidation of silicon (LOCOS).The oxide collars 23, 24 do not form on the sacrificial spacers 28.Optionally, the trench may be widened by laterally etching the substrate7 before forming the oxide collars 23, 24.

Referring now to FIG. 9, the deep-type trench 26 and offset-type trench27 are then further etched into the substrate 7 to form the capacitorportion of the trench regions. In one embodiment of the presentinvention, bottling trenches may be formed to further increase eachmemory trench device's capacitance. The bottled shaped enlargement 30having enlarged lateral dimensions W₃ are formed by varying thedirectional properties of the etch process. Specifically, the etchchemistry of an anisotropic etch process, such as reactive ion etch, maybe varied from anisotropic to isotropic by adjusting the ratio offluorine (F) to oxygen (O₂) to hydrogen bromide (HBr). The ratio ofanisotropic to isotropic etching component of the plasma etching processcan be set by way of ion bombardment by a selection of processparameters, such as radio frequency power, pressure, magnetic fieldstrength and/or process gas. Examples of suitable etching gases are NF₃,XeF₂ or SF₆.

Multiple bulbulous regions 30, for example, can be formed within thetrenches 26, 27 to increase capacitance. Note that adjacent trenchregions 26, 27, never touch. Therefore, there is no shorting betweenmemory devices. Large storage node capacitance for a memory device canbe gained by the formation of bottle trenches and multiple bottle shapedtrenches spatially offset by a vertical dimension. The bottlingenlargements 30 may be omitted.

In one embodiment of the present invention, a self-aligned buried lowerplate (not shown) may be formed in a portion of the substrate 7surrounding the lower portion of trench 26, 27, below the equal lengthoxide collars 23, 24. The self-aligned buried lower plate may be formedby ion implantation, where the nitride layer 12 and the oxide collar 23,24 block diffusion of the dopant species so that the dopant is containedto the regions of the substrate 7 that is below the oxide collar 23, 24,and surrounds the trenches 26, 27. Alternatively, the dopant may beintroduced by depositing a doped material into the lower portion of thetrenches 26, 27 and then diffusing the dopant from the deposited dopedmaterial into the trench sidewalls. The doped material may be depositedby conventional deposition processes, such as chemical vapor deposition,and may comprise arsenic doped silicate glass. (ASG).

Since the oxide collar 23, 24 blocks dopant diffusion, the buried lowerplate is self-aligned to the lower edge of the oxide collar 23, 24.Preferably, the dopant is an N-type dopant. N-type dopants in a Sisubstrate include, but are not limited to: As, Sb, or P. Preferably, theN-type dopant is As and the dopant concentration is greater than 1×10¹⁹atoms/cm³.

Referring now to FIG. 10, a node dielectric 31 is then conformallyformed lining the trenches 26, 27. The node dielectric 31 may be formedby conventional deposition or growth processes. The node dielectric 31material may be an oxide, oxynitride, or nitride. Preferably, a nodedielectric 31 comprising nitride may be formed using a combination ofthermal nitridation and chemical vapor deposition. First, a nitride seedlayer is initially formed by thermal nitridation. Thereafter, a secondnitride layer is deposited using low-pressure chemical vapor deposition(LPCVD). Preferably, the nitride material is Si₃N₄. Alternatively, anode dielectric 31 comprising oxide may be formed by thermal oxidation.The thickness of the node dielectric 31 may range from about 3 nm toabout 10 nm, preferably being from about 4 nm to about 5 nm.

Still referring to FIG. 10, the trenches are then filled with aconducting material, which may be polysilicon, a metal, or anycombination thereof. Polysilicon, which may be doped, is preferred fortrench fill. The polysilicon, is blanket deposited using a conventionaldeposition process, such as LPCVD or PECVD. Preferably the depositionprocess is LPCVD, since LPCVD is a highly conformal deposition process.Preferably, during formation the polysilicon layer may be in-situ dopedwith N-type dopants, such as As, Sb, or P, preferably being As. Thedopant concentration in the polysilicon layer may be on the order ofabout 1×10²⁰ atoms/cm³. Following deposition, the doped polysiliconlayer is then recessed in an initial polysilicon etch using adirectional etch process, such as reactive ion etch. Preferably, theetch chemistry is selective to removing polysilicon withoutsubstantially etching the nitride layer 12 or the node dielectric 31.The etch chemistry may be sulfuric fluoride (SF₆), chlorine (Cl₂) orother fluorine containing etch chemistries. The initial polysilicon etchprocess may be timed.

Following the initial polysilicon etch process, the polysilicon in theoffset-type trench 27 is recessed below the upper surface of the collaroxide 23, 24, where the top surface of the recessed polysilicon 32 inthe deep-type trench 26 is at the same depth from the surface of thesubstrate 7 as the recessed polysilicon 33 in the offset-type trench 27.Therefore, following the initial polysilicon etch the top surface of therecessed polysilicon 33 in the offset-type trench 27 is on the sameplane as the top surface of the recessed polysilicon 32 in the deep-typetrench 26.

Referring to FIG. 11, a photoresist block mask 35 is then formed atop aportion of the substrate 7 including the offset-type trench 27, where aportion of the substrate 7 including the deep-type trench 26 is exposed.The polysilicon 32 within the deep-type trench 26 is then recessed belowthe top surface of the collar oxide 23, 24 using a conventional etchprocess selective to removing polysilicon without substantially etchingthe photoresist block mask 35, node dielectric 31 and the sacrificialnitride spacers 28. Preferably, the etch chemistry is selective toremoving polysilicon without substantially etching the photoresist orthe Si₃N₄ of the node dielectric 31 and the sacrificial nitride spacers28. The etch chemistry may be sulfuric fluoride (SF₆), chlorine (Cl₂) orother fluorine containing etch chemistries. Following deep-type trench26 polysilicon 32 recessing, the photoresist block mask 35 is strippedby a conventional process. The recessed polysilicon 32, 33 in thedeep-type trench 27 and offset-type trench 26 is hereafter referred toas the polysilicon nodes 32, 33.

Turning to FIG. 12, an upper portion of the node dielectric 31 and thesacrificial nitride spacers 28 are then removed by a wet chemical etchselective to the polysilicon nodes 32, 33, and the substrate 7. The term“upper portion” is meant to denote the portion of the node dielectric 31that extends above the polysilicon nodes 32, 33, in both the deep-typetrench 26 and offset-type trench 27.

The sacrificial spacers 28 and the upper portion of the node dielectric31 are removed by a conventional etch process. A portion of the nitridelayer 12 may be removed in the process of removing the sacrificialspacer 28 and the upper portion of node dielectric 31. Note, that theinitial thickness of the nitride layer 12 is typically about 2000 Å,while the total thickness of the sacrificial spacer 28 and the upperportion of node dielectric 31 is about 200 Å. Therefore, removing thesacrificial spacer 28 and the upper portion of the node dielectric 31does not entirely remove the nitride layer 12.

Following upper dielectric 31 etch, the collar oxide 23, 24 is recessedby a wet chemical etch. Preferably, the wet chemical etch selectivelyetches the SiO₂ of the oxide collars 23, 24 without substantiallyetching the polysilicon node 32, 33 or the trench 26, 27 sidewalls. Thecollar oxide 23, 24 etch chemistry may comprise HF. Alternatively, theoxide collars 23, 24 may be recessed during the process of removing thesacrificial spacers 28 and the upper portion of the node dielectric 31by using a hydrofluoric/ethylene glycol (HF/EG) chemistry, which etchesboth oxides and nitrides.

Referring to FIG. 13, buried strap regions 15 are then formed atop therecessed oxide collars 23, 24. The buried strap regions 15 function asone terminal of the source and drain regions of the subsequently formedvertical transistors 10 and are in electrical communication with theunderlying capacitor. The buried strap region 15 is a thin layer ofundoped or doped polysilicon, which extends into the recess in the topinside corner of the recessed oxide collar 23, 24. During subsequentthermal processes, dopants, such as arsenic, out-diffuse into thesubstrate 7 thereby forming the source (or drain) of the transistor,which will be formed in the upper trench. In one embodiment, dopantsout-diffuse from a doped buried strap region 15. In another embodiment,when the buried strap region 15 is not doped, the dopants canout-diffuse from the doped node poly 32, 33 through the buried strapregion 15.

The buried strap poly layer can be formed by a deposition and etchbackprocess. A thin layer of thermal nitride (not shown) of approximately 10Å can be formed prior to buried strap poly formation to prevent formingdefects, such as dislocations, at the interface of the buried poly andthe substrate. The etchback process can be a timed wet chemical etchcomprising nitric (HNO₃)/hydrofluoric (HF) or ammonia.

Referring to FIG. 14, a trench top oxide (TTO) layer 36 is formed atopthe polysilicon nodes 32, 33. Preferably, the trench top oxide (TTO) 36may comprise SiO₂. The trench top oxide (TTO) 36 can be deposited byhigh-density plasma (HDP) CVD and may have a thickness of approximately250 Å on trench sidewall and 700 Å on top of polysilicon nodes 32, 33,due to the anisotropic nature of the high-density plasma (HDP) CVDprocess (The deposition rate of the HPD process is higher in thevertical direction than in the lateral direction). A sacrificial layerof thermal oxide (not shown), having a thickness of approximately 50 Å,can be optionally formed before TTO 36 deposition to protect the trenchsidewall from the attack of plasma during the HDPCVD process.

Substantially all of the oxide on the trench sidewall is then removed bya timed wet etch comprising buffered HF (BHF) or diluted HF (DHF). Thetimed wet etch can remove approximately the same amount of HDP oxidefrom the trench top oxide (TTO) 36. Therefore, following the timed wetetch the resulting thickness of the trench top oxide (TTO) 36 is on theorder of approximately 350 Å. If the optional sacrificial layer ofthermal oxide is present, the sacrificial thermal oxide layer can beremoved along with the HDP oxide by a buffered HF (BHF) or diluted HF(DHF) solution.

Gate dielectric layers 37 are then formed by thermal oxidation.Alternatively, the gate dielectric regions may be formed by depositionprocesses. Suitable examples of gate dielectrics that can be employed asthe gate dielectric 37 include, but are not limited to: SiO₂, Si₃N₄,SiON, Al₂O₃, ZrO₂, HfO₂, Ta₂O₃, TiO₂, perovskite-type oxides orcombinations and multi-layers thereof. The thickness of the gatedielectric 37 may range from about 3 nm to about 10 nm, preferably being5 nm to 6 nm.

Still referring to FIG. 14, a gate conductor layer 38 is then depositedby conventional deposition processes, such chemical vapor deposition(CVD), plasma-assisted CVD, high-density plasma chemical vapordeposition (HDPCVD)), plating, sputtering, evaporation and chemicalsolution deposition. The gate conductor material is preferably dopedpolysilicon but may also be comprised of Ge, SiGe, SiGeC, metalsuicides, metallic nitrides, metals (for example W, Ir, Re, Ru, Ti, Ta,Ht Mo, Nb, Ni, Al) or other conductive materials. Following deposition,the gate conductor layer 38 is then planarized to the top surface of thenitride layer 12 by conventional planarization methods, such as chemicalmechanical planarization (CMP).

The channel 39 of the vertical transistor 10 and the drain 40 may thenbe formed by ion implantation. The channel 39 may be formed byimplanting p-type dopants with an implant energy sufficient to positionthe dopants atop the N-type buried strap 15. P-type dopants in a siliconsubstrate 7 include elements from Group III of the Periodic Table ofElements, preferably being boron (B). Implanting N-type dopants withimplant energy sufficient to position the N-type dopants atop thechannel 39 may form the drain 40 of the vertical transistor 10.Conventional processes may then be utilized to provide electricalcommunication to the memory array.

Referring to FIG. 15, another memory array according to anotherembodiment of the present invention includes at least one other-typememory device 23, each of the at least one other-type memory device 23comprising another transistor 10′, another underlying capacitor 20′, afurther-offset buried strap 15′, and another collar region 25 withanother vertical length L5, wherein the further-offset buried strap 15′is located at another depth that is different from the first depth andfrom the second depth and is positioned on the another collar region andis in electrical contact with both the another transistor and theanother underlying capacitor, and the another vertical length L5 isequal to the first vertical length L3. The structure of the anothermemory array containing the at least one other-type memory device isformed by repeated applications of the methods described above that isused to differentiate the depth of the first-type memory trench device21 and the second-type memory trench device 22.

While the present invention has been particularly shown and describedwith respect to preferred embodiments thereof, it will be understood bythose skilled in the art that the foregoing and other changes in formsand details may be made without departing from the spirit and scope ofthe present invention. It is therefore intended that the presentinvention not be limited to the exact forms and details described andillustrated, but fall within the scope of the appended claims.

1. A method of forming a memory array comprising: etching a substrate toprovide a first trench having an initial depth and a second trenchhaving an intermediate depth to produce an offset in a verticaldimension between said first trench region and said second trenchregion; forming sacrificial sidewall spacers to said initial depth ofsaid first trench and to said intermediate depth of said second trench;etching said first trench to a first collar depth and said second trenchto a second collar depth, wherein said offset between said first trenchand said second trench is maintained; forming collars within said firsttrench and said second trench, said collars positioned underlying saidsacrificial sidewall spacers within said first trench and said secondtrench; forming capacitors in said first trench and said second trench,each of said capacitors extending above a bottom surface of saidcollars; recessing said collars below a top surface of said capacitors,wherein recessed collars in said first trench and said second trench areof equal length; forming buried straps atop said recessed collars insaid first trench and said second trench, wherein said buried straps ofsaid first trench are separated from said buried straps of said secondtrench by said offset in said vertical dimension; and formingtransistors atop said capacitors in said first trench and said secondtrench.
 2. The method of claim 1 wherein said etching said substrate toprovide said first trench having said initial depth and said secondtrench having said intermediate depth further comprises: providing afilm stack atop said substrate; patterning said film stack to exposeregions of said substrate where said first trench and said second trenchare subsequently formed; applying a block mask atop said regions of saidsubstrate where said first trench is subsequently formed and etchingsaid second trench; stripping said block mask; and etching said secondtrench to said intermediate depth and said first trench to said initialdepth.
 3. The method of claim 1 wherein said collars are formed by localoxidation of silicon.
 4. The method of claim 1 wherein forming saidcapacitors further comprises: etching said first trench to a firstcapacitor depth and said second trench to a second capacitor depth,wherein said offset between said first trench and second trench ismaintained; depositing a node dielectric within said first trench andsaid second trench; forming polysilicon within said first trench andsaid second trench; recessing said polysilicon until said polysiliconwithin said first trench is recessed below a top surface of said collarwithin said first trench; applying a block mask atop said first trenchregion; and recessing said polysilicon within said second trench untilsaid polysilicon is recessed below a top surface of said collar withinsaid second trench.
 5. The method of claim 1 wherein said capacitorsfurther include bottled regions formed by an etch process havingselective alternating anisotropic and isotropic etch properties.
 6. Themethod of claim 4 wherein said recessing said collars comprises:removing said sacrificial sidewall spacers and an upper portion of saidnode dielectric by selective etch; and selectively etching said collarsto produce divots in said first trench and said second trench, whereinsaid divots within said first trench are separated from said divotswithin said second trench by said offset in said vertical dimension. 7.The method of claim 6 wherein said forming said buried straps comprises:depositing strap polysilicon within said first trench and said secondtrench; and etching back said strap polysilicon, wherein a remainingportion of said strap polysilicon is positioned within said divots. 8.The method of claim 1 further comprising a trench top oxide positionedbetween said capacitors in said first trench and said second trench andsaid transistors in said first trench and said second trench.
 9. Themethod of claim 1 wherein said forming said transistors comprises:forming gate dielectrics on exposed sidewalls of said first trench andsaid second trench; forming gate regions within said first trench andsaid second trench; doping said substrate atop said buried straps toprovide a channel; and doping said substrate atop said channel toprovide a drain.
 10. The method of claim 1 further comprising forminganother trench having another offset buried strap atop equal lengthcollars electrically connecting another transistor to another capacitor.